Used TEL / TOKYO ELECTRON Indy Plus #293670483 for sale

TEL / TOKYO ELECTRON Indy Plus etcher is a state-of-the-art semiconductor processing tool designed for etch, anisotropic etch, and surface cleaning applications. The equipment offers maximum precision and reliability in semiconductor processes such as oxide etch, s-layer etch, copper etch, and other advanced etch and cleaning operations. Its unique design philosophy puts state-of-the-art features and technologies into a complete single package, simplifying the entire process and reducing cost of ownership while boosting efficiency and cost savings. TEL INDYPLUS consists of a compact package and is designed to be easily integrated into existing cleanroom environments. This system includes automated control, reliable monitoring, and flexible configuration options. The unit also features dynamic pressure control, high speed rotation, extended RF power range adjustment, software upgrade compatibility, and simple recipe control for higher accuracy and repeatability. The state-of-the-art etcher is equipped with an efficient gas delivery machine and offers a wide range of reactive gases, such as SF6, CHF3, CF4, C4F8, O2 and Ar. It uses a digitally-controlled electrostatic chuck for holding the wafer at the precise angle and delivers uniform processing parameters over a range of etching and surface cleaning applications. The tool's Internal RF Generator offers a power range of up to 600 W and can be easily adjusted for optimized process results. The option of adding a powerful high voltage generator helps to custom tailor the etch recipe for maximum efficiency. TOKYO ELECTRON INDY PLUS etcher also includes a variety of advanced features such as an ion suppressor, precision temperature control, target pressure control, and a 3D Laser Interferometer for enhanced accuracy and repeatability. This feature helps to reduce wafer waste and ensure more reliable end-product quality. The built-in cleaner also assists in cleaning the wafer between processing cycles, helping to maintain the integrity of the wafer. TOKYO ELECTRON Indy Plus etcher is a highly reliable and cost-effective solution for semiconductor etching and surface cleaning applications. It offers an all-in-one solution that is capable of meeting the highest processing requirements, while maintaining a low cost of ownership. The asset can be easily integrated with existing cleanroom automation systems and is ideally suited for high-volume and cost-sensitive manufacturing processes.