Used TEL / TOKYO ELECTRON Indy Plus #293754740 for sale
URL successfully copied!
ID: 293754740
Wafer Size: 12"
Furnace, 12"
Process: TEOS
Atomic Layer Deposition (ALD)
Poly
Nitride
2009-2018 vintage.
TEL / TOKYO ELECTRON Indy Plus is a sophisticated etching and ashing platform that provides users with high level of precision and accuracy. It helps to create complex geometrics with tolerances of 0.3-2 microns. It is ideal for aerospace, medical and semiconductor industry. TEL INDYPLUS is an etching/ashing machine that integrates two processes together for fast results in the highest quality. It combines etching and ashing in one single process and is capable of patterning up to two levels of structures. The high levels of accuracy and speed of TOKYO ELECTRON INDY PLUS can be credited to two main components: the E-Gun and E-Pod. The E-Gun uses a high voltage to generate electric arcs to etch and ashing patterns on the substrate. The Electric pod, on the other hand, speeds up the process and helps reduce the time required etch and ashe by a considerable amount. It also helps reduce non-uniformities in the etched/ashed pattern. INDY PLUS also features high accuracy material control as it is equipped with a high performance CCD (charge coupled device) camera and laser detection technology. This ensures a high level of precision and accuracy as the camera is able to detect subtle changes such as non-uniformity, warpage and stress variation. Together, these features make TEL / TOKYO ELECTRON INDYPLUS one of the most precise and accurate etching and ashing machine on the market. INDYPLUS is also a significantly flexible machine as it can be tailored to the needed specifications for a range of applications including silicon etching, etched metals, reverse etching, and emboss etching. Additionally, Indy Plus also supports various substrates such as Si, Ge, quartz, Al and SiC ensuring further flexibility. The high level of accuracy, excellent process control, and flexibility make TEL Indy Plus an ideal choice for user in the aerospace, medical and semiconductor industry. TOKYO ELECTRON INDYPLUS integrates the etching and ashing process resulting in improved throughput, while eliminating many of the errors associated with manual operation. The affordable cost and high level of accuracy further add to it allure.
There are no reviews yet