Used TEL / TOKYO ELECTRON Indy Plus #293821712 for sale

TEL / TOKYO ELECTRON Indy Plus is an etcher/asher for the semiconductor industry, providing advanced etching and ashing technology for semiconductor devices. TEL INDYPLUS is designed to be highly efficient and precise, offering sub-0.5 nm etch resolution and greater than 5 nm accuracy. It has a single wafer size of 6 inches or 8 inches, and can process films and steps of up to 450nm. TOKYO ELECTRON INDY PLUS is equipped with motorized Independent Forward and Backward transverse stages which provide high accuracy for alignment and improved repeatability. TEL / TOKYO ELECTRON INDY PLUS utilizes a unique etching technology called Volatile Organic Compound-assisted Etching (VOC-ET) which is an advanced etching technology developed by TEL. VOC-ET technology is capable of processing fine-grain silicon and FinFET devices with vertical side walls and excellent etch profiles. In addition, TEL / TOKYO ELECTRON INDYPLUS employs an extract memory compatibility capability, which allows users to easily recall recipes from previous devices. TEL INDY PLUS also offers users the ability to customize etch and ashing recipes using TOKYO ELECTRON proprietary software. TEL Indy Plus is equipped with multiple process chambers that facilitate both etching and ashing simultaneously and independently. The process chambers are equipped with a fluorine-free gas mixture delivery equipment, which is designed to minimize process emissions while maximizing etch performance. TOKYO ELECTRON Indy Plus is also designed for easy maintenance and cost effective operations, with an automated media delivery system and a water-cooled exhaust unit. INDYPLUS also comes with remote access capabilities, allowing users to monitor and adjust process settings from a central location. Indy Plus is designed to deliver consistent, high quality etch and ashing processes, while meeting the specific needs of the semiconductor industry. The machine helps reduce the time and cost associated with devices and reliability testing, as well as provides enhanced process capability for advanced device nodes. TOKYO ELECTRON INDYPLUS is capable of processing multiple substrates and wafer sizes, and is designed to meet the highest standards of productivity and uptime.