Used TEL / TOKYO ELECTRON Indy Plus #293828761 for sale

TEL / TOKYO ELECTRON Indy Plus is an etcher / asher designed for a variety of semiconductor applications and processes. It is a small-footprint, single-wafer etch/ash equipment that provides precise, high-throughput heterogeneous etch/ash processes. The etcher/asher has a small 150mm chamber that can house up to 100 wafers and is capable of a range of etching/ashing processes for various materials. TEL INDYPLUS etcher/asher has an advanced system design that ensures precise process repeatability of wafer etching or ashing uniformity over the entire wafer. TOKYO ELECTRON INDY PLUS etcher/asher utilizes electron cyclotron resonance (ECR) plasma with an electron plasma source to provide highly uniform plasma etching or ashing. The option of plasma source can be changed from ECR to standard inductively coupled plasma (ICP). Additionally, an advanced piezo-actuator and wafer-spin option can be included to further customize the process for specific requirements. The etcher is equipped with a high quality mineral build-up protection unit, and the advanced wafer-spin control ensures highly uniform ion bombardment which is essential for highly uniform etching/ashing. TEL / TOKYO ELECTRON INDY PLUS etcher/asher is built with a variety of monitoring and control features, which include pressure, temperature, and RF power adjustments that are independent of process time. This allows for a wide range of processes to be performed, such as oxide etching, nanotexturing, and selective etching or ashing. The machine also has a real-time display of etch/ash profiles for ease of monitoring process activity. INDY PLUS etcher/asher is highly customizable and can be configured to meet specific process requirements. The etcher/asher is designed for maximum process uniformity and repeatability and is well suited for production operations with medium to high volume processes. The tool is also compatible with a range of materials, making it ideal for multiple process applications.