Used TEL / TOKYO ELECTRON Indy Plus #293828763 for sale

TEL / TOKYO ELECTRON Indy Plus is a high-end, precision etcher/asher designed specifically for microelectronics, photomask, and other thin film fabrication processes. It is capable of delivering a precision etching capability, using reactive ion etching (RIE) technology, over a wide range of geometries and materials. TEL INDYPLUS features a fully enclosed chamber with integrated temperature and vacuum control, enabling repeatable and reliable etching, even on hard-to-etch materials. The system has an interactive 8-inch color touchscreen for controlling all aspects of the etcher/ashers operation. TOKYO ELECTRON INDY PLUS also has a high resolution optical viewport to monitor etching processes. TOKYO ELECTRON Indy Plus can handle a wide range of processes and geometries. It is equipped with high quality float stage and three-axis system capable of micron-level positioning. Indy Plus also has auto-match feature wherein the system matches its etching parameters to the material being etched. This maximizes the quality of the etched material while minimizing waste. In addition, its modern design enables access to difficult corners and curved surfaces with ease. TEL Indy Plus offers superior safety features to ensure maximum protection of personnel and materials from hazardous gases and heat generated during the etching process. INDY PLUS also offers advanced networking and communication capabilities, enabling remote control of the process and integration with existing production networks. TEL / TOKYO ELECTRON INDY PLUS will provide you with selection of etching and cleaning processes for many material types, such as photomasks, polyimides, SiN/SiO2, and metals. The processes are specifically designed for microelectronic and MEMS applications, and can process a wide range of wafer sizes up to 200 mm. TEL INDY PLUS is the ideal etch and asher for high precision, high quality, repeatable results in production.