Used TEL / TOKYO ELECTRON Indy Plus #293828764 for sale

TEL / TOKYO ELECTRON Indy Plus
ID: 293828764
Vintage: 2013
Vertical furnace Process: ALD LP 2013 vintage.
TEL / TOKYO ELECTRON Indy Plus is a state-of-the-art etcher/asher designed to allow for precise lithography and etching techniques in both single wafer and batch etch applications. TEL INDYPLUS is capable of achieving high resolution etching of any material up to 32 nm in thickness. It has a wide range of features and is customizable to suit different process needs. It can be configured for different process parameters such as base pressure, pressure balance, hardness, speed, Power, and temperature. TOKYO ELECTRON INDY PLUS has a computer-controlled equipment designed to allow for accurate control over the entire process. Through the use of its built-in software, users are able to adjust various parameters, such as material thickness, process speed, gas pressures, and more. This precision provides users with tight repeatability and improved process control. As an added feature, the system can also perform lithography such as sputtering, resist strip, and oxide deposition. Indy Plus is designed to operate in either a single wafer or batch mode. In single wafer mode, the unit allows for uniform etching of one wafer at a time. This allows for a fast and efficient etching process. In batch mode, the machine can etch multiple wafers at one time. This feature increases throughput and allows for greater flexibility in the lithography process. INDYPLUS comes with multiple options such as optional extra gas boxes, valves, and sensors. These extras can be used to provide further control over the process performance, giving users the ability to fine-tune their desired results. The tool also has a comprehensive library of recipes to suit different etching techniques, from oxide etching to dry and wet etching. TEL INDY PLUS is designed to be highly versatile and user-friendly, making it a popular choice among users in all sorts of industries. From its accuracy and precision to its customization capabilities, INDY PLUS is the ideal solution for any etching or lithography needs. With its many features and options, users are sure to get the best from their etching or lithography processes with TEL / TOKYO ELECTRON INDY PLUS.
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