Used TEL / TOKYO ELECTRON Indy Plus #293828765 for sale

TEL / TOKYO ELECTRON Indy Plus is an advanced etcher/asher used in semiconductor fabrication. It is an advanced tool designed to give accurate, repeatable, and reliable etching and ashing steps in semiconductor manufacturing. It is built with a powerful plasma source, robotic arm motion, and a load lock chamber for easy loading and unloading of samples. The plasma source is designed to generate a uniform plasma capable of oxide, nitride, and polysilicon etching. Its robotics arm is capable of precise sample manipulation with a feedback loop to maintain sample placement accuracy. TEL INDYPLUS' load lock chamber provides an efficient and cost-effective solution for loading wafers. It features two exchangeable wafer cooled stages and an internal gas mixing unit that can provide multiple gases for special etching/ashing requirements. Furthermore, TOKYO ELECTRON INDY PLUS has a fast response gas field-effect transistor (FET) monitoring system that can continuously monitor the gas concentrations for optimal process control. TEL INDY PLUS is supported by fully realized recipes that are developed to control and execute the etching/ashing stages. It also has a data management system that can monitor, store, and archive all data for future process analysis. Additionally, Indy Plus supports a wide range of specialty tools to further enhance process control. The tools include a locket gas dosing unit, integrated downstream sensor for deposition rate control, and an RF plasma generator. INDYPLUS is a highly valuable tool in semiconductor fabrication as it is designed to provide maximum output and yield with minimal input. Its robust design and efficient operation give customers the ability to rapidly produce quality ICs with small footprints and high yields. In addition, its user-friendly interface and comprehensive versatility make it suitable for fabs of every size, from small to large. TEL Indy Plus is a technologically advanced etcher/asher that can provide precise etching and ashing solutions for semiconductor manufacturing applications. It is a highly valuable tool in the industry with its robust design, efficient loading, and comprehensive process control and data management.