Used TEL / TOKYO ELECTRON Indy Plus #293828767 for sale

TEL / TOKYO ELECTRON Indy Plus is a highly advanced etcher / asher equipment designed for precision material removal and dielectric film deposition. This system offers a wide range of applications, from basic etching/doping/deposition for semiconductor devices, through to high-end plasma etching for copper line patterns in advanced packaging designs. TEL INDYPLUS unit offers both high levels of speed and precision, allowing for highly repeatable results. The core of TOKYO ELECTRON INDY PLUS machine is the touch-screen PC, which houses the hardware components that make up the data acquisition and control tool. This touch-screen PC is equipped with advanced process-control software that allows the user to quickly and easily configure precise parameters for the application at hand. The PC also includes a number of safety features, such as automated training mode for expert-level users, real-time monitoring and more. INDYPLUS asset can be configured with a variety of tools, depending on the process at hand. Two types of etchers are offered, the Toggle etcher and the Side etcher. Both of these etching systems offer a number of programmable orbital and vertical movements, allowing for precise control of the etch rate, selectivity and uniformity. Additionally, the Side etcher offers the capacity to etch up to 1000um deep in a single pass. For Dry etching, TEL / TOKYO ELECTRON INDYPLUS model offers an advanced Gas Flow Controller, allowing for fast and precise flow control for all etch gases, as well as Alarm Annunciator for fast alarm response and feedback. Additionally, the plasma chamber is equipped with an advanced RF-driven feature set, controlling gas composition, concentration, pressure and flow in order to deliver high-accuracy etch profiles. For increased throughput, the equipment includes automated wafer loading and unloading, with a wafer-to-wafer processing time of under 10 seconds. For film deposition applications, Indy Plus system offers a variety of deposition sources such as filtered vacuum arcs, sputter cathodes, and evaporation sources. These sources come with adjustable output, and are suitable for a wide variety of materials, ranging from metals to polymeric and organic materials. Additionally, the onboard source monitoring unit allows for full control and feedback on the deposition process. The combination of high-performance hardware, flexible software, and a variety of powerful tools makes TOKYO ELECTRON Indy Plus an ideal solution for a wide range of etching and deposition applications. Whether you're an expert user, or in need of basic etch/doping/deposition capabilities, TOKYO ELECTRON INDYPLUS machine provides fast, repeatable results, while allowing for complex process-development and optimization.