Used TEL / TOKYO ELECTRON Indy Plus #293828768 for sale

TEL / TOKYO ELECTRON Indy Plus
ID: 293828768
Vintage: 2013
Vertical furnace Process: MTO 2013 vintage.
TEL/TOKYO ELECTRIN TEL / TOKYO ELECTRON Indy Plus is an automated asher/etcher machine that is developed for a wide range of substrate-etching applications. It can process various materials such as semiconductor wafers, MEMS (Microelectromechanical Systems) and other thin substrates. The machine features a meticulously designed process chamber that enables precise etching speed and processes uniform results. Its innovative temperature control equipment ensures superior substrate uniformity and allows for a number of unique and specialized configurations and operations. TOKYO ELECTRON/TOKYO ELECTRIN TEL INDYPLUS is equipped with a precise micro-motion table that allows for precise etching without involving any manual movements. This feature makes it easy to meet process tolerances and provide desired results. The table also utilizes a patented glove box system that reduces the flow of contaminants from the process chamber. TOKYO ELECTRON INDY PLUS also features an onboard gas mixing controller. This allows the user to precisely mix dry and inert or corrosive gases to create the desired atmosphere for etching operations. Compressed gas from the unit is sent to an analysis cell for further imaging and analysis. The user can control the entire process by window-based graphic user interface and contact the host computer with a remote connection. TEL / TOKYO ELECTRON INDY PLUS is versatile and can handle a variety of operations such as plasma and reactive ion etching, cryogenics, and sputter deposition. It also offers advanced capabilities such as scan control, data logging and programmable recipes. It has a built-in safety interlock that prevents dangerous operation conditions that can result in severe injuries and property damage. TOKYO ELECTRON INDYPLUS can be integrated with other components to create a complete production machine. It can be used with wet benches, resist strippers, and additional tool peripherals. It can also be easily calibrated to specific materials and requirements. TEL / TOKYO ELECTRON/TOKYO ELECTRIN TEL / TOKYO ELECTRON INDYPLUS offers a unique solution for those seeking a precision substrate-etching appliance with a wide variety of advanced capabilities. Its cutting-edge technology ensures superior results and quality control and its versatility makes it suitable for a variety of operations and applications.
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