Used TEL / TOKYO ELECTRON Indy Plus #293828769 for sale

TEL / TOKYO ELECTRON Indy Plus is an etcher and asher equipment used extensively in the semiconductor industry for advanced substrate processing. The system is capable of performing etching processes such as deep reactive ion etching (DRIE), dry etching, and plasma etching. It is also capable of ashing, which is used for the removal of by-products and any other unwanted materials on the substrate surface. TEL INDYPLUS unit is an advanced plasma etcher, designed to reduce time and costs while ensuring a high quality and reliable etch process. It is an integrated machine that combines a vacuum chamber, a gas control tool, a substrate heating unit and a plasma generator. The asset consists of two parts: TOKYO ELECTRON INDY PLUS etcher and the Indy Asher, and it is capable of processing substrates up to 200 mm in diameter. TEL / TOKYO ELECTRON INDYPLUS etcher features a high-precision capacitive-coupled RF excitation source; this allows for the efficient generation of a stable and uniform plasma, resulting in reliable and repeatable process results. The model is also equipped with an advanced digital control processor, allowing for precise and programmable control of the etching process, such as etch depth, shape, and profile. The Indy Asher utilizes a fast and reliable ashing process, designed to remove organic, metallic and inorganic materials from substrates. The asher is able to clean surfaces quickly, with a precision and repeatability that is superior to conventional ashing techniques. It provides a uniform temperature distribution in the plasma chamber, allowing for an even etching rate. TEL / TOKYO ELECTRON INDY PLUS equipment is equipped with a number of features that increase the process efficiency and improve the results of the etching and ashing process. It provides tight control of the pressure, gas flow, temperature and RF power, so users can accurately optimize their processing parameters and repeat their set conditions easily. The system also features a gas management unit to ensure the gases used in the etching and ashing process are efficiently supplied, and an integrated remote monitoring display for the real-time monitoring of the process. TEL INDY PLUS machine is an advanced and reliable etching and ashing tool, designed to provide customers with high-precision and repeatable substrate processing. It is ideal for use in a range of semiconductor industries, allowing users to achieve improved process results in a fraction of the time.