Used TEL / TOKYO ELECTRON Indy Plus #293828773 for sale

TEL / TOKYO ELECTRON Indy Plus is an etcher/asher geared to semiconductor device manufacturing that is designed for superior resolution and results. TEL INDYPLUS is a 50-watt plasma assisted Si-based etcher/asher that uses low-concentration chlorine gas as its etchant. The equipment has two independent ion sources, which are optimized to deliver superior etching processes on both positive and negative photoresists. The etch source uses a rapid thermal oxidation source, which is designed to eliminate low frequency drift and provide higher throughput. In addition, TOKYO ELECTRON INDY PLUS includes a wide range of features specifically designed to address common challenges in semiconductor device fabrication, including edge roughness, noise reduction, substrate uniformity, and overall dimensional accuracy. Furthermore, INDYPLUS utilizes an independent, feedback control system to ensure precise etching rates and parameters. This feature allows for accurate pattern control, reducing the need for additional iterations or process steps, and significantly increases process repeatability. The unit is equipped with an advanced arithmetic curve fitting feature, making it easy to accurately create traceable, seamless etching patterns for any process requirement. INDY PLUS utilizes a high-end PECVD process to create thin-film layers that adhere to and protect the underlying substrate. This process utilizes a plasma-enhanced, low-frequency CVD (LFCVD) reactor capable of producing high-quality coating layers with uniform step coverage and excellent adherence. Coupled with the advanced optics machine, this allows for the production of a variety of device structures with intricate features and tight tolerances. This etcher/asher also comes with an advanced toolset to enable experimentation and customization of etching and ashing processes. In addition, multiple pumps can be configured to enable a wide range of etching and ashing capabilities, including sequential etching and remote ashing. These features, along with its excellent process control and repeatability, makes Indy Plus an ideal etcher/asher solution for semiconductor device fabrication.