Used TEL / TOKYO ELECTRON Indy Plus #293828774 for sale

TEL / TOKYO ELECTRON Indy Plus is a semi-automatic, compact etcher/asher equipment designed to be able to meet a variety of etching and ashing needs within the semiconductor industry. It has an automated etching and ashing rates of up to 40 cycles/hr for etching and entire ashing cycle times of up to 16 minutes, and supports a variety of substrates including silicon wafers, flat panel displays, aluminum metallization layers, and interconnects. The system weighs approximately 950 kg, with an overall unit footprint of approximately 1200 × 1100 mm. Operators will be able to access the machine via a computer that supports both Windows and Linux. The operating tool is a proprietary software developed by TEL. TEL INDYPLUS is composed of an open-table cassette loading station, a machine table, an ashing chamber, etching chamber, asset controls, and gas panels. The open-table cassette loading station functions as an automated loading and unloading center for the cassettes that contain up to 25 substrates. The machine table, located directly to the right of the cassette table, houses all of the essential components of the model. This includes the RF generator, gas panels, gas lines, load locks and vacuum pumps. The etching chamber is located directly below the machine table. It features an automated bottom lift cassette loading equipment, allowing the operator to precisely control the substrate position during etching. It also has dual RF suppliers with load-lock capabilities to further improve the processing times. The ashing section houses the ashing chamber with dedicated quartz tubes. The system is capable of fast ashing, which helps minimize processing time. It also has an efficient backside exhaust unit that ensures the substrates are properly ashed. The machine is also equipped with a variety of safety features including pressure sensors, emission monitors, and leak detection systems. Additionally, it is compatible with standard wafer-handling tooling and accessories such as probes, tweezers, gloves, pins, and quartz boats. TOKYO ELECTRON has ensured that TOKYO ELECTRON INDY PLUS tool is extremely user-friendly and efficient, making it a popular choice for many semiconductor companies around the world.