Used TEL / TOKYO ELECTRON Indy Plus #293828775 for sale

TEL / TOKYO ELECTRON Indy Plus is an advanced etcher / asher used in semiconductor wafer fabrication processes. It is the latest in a family of etching equipment made by TEL. The machine is capable of handling a slew of duties related to etching and ashing for both 300mm and 200mm wafers. Its advanced features provide reliable solutions for critical integrated circuit process steps. The machine is equipped with a highly efficient ceramic RF chamber, providing better etching selectivity, accuracy and uniformity. It also has a load lock and process box which means that the wafer can be loaded onto the equipment without exposure to the environment, ensuring material purity. Its process gas delivery system is also connected to a wet bench for efficient gas delivery and temperature regulation. It also has a high-resolution camera with image capture capabilities for wafer inspection in order to prevent process flaws. TEL INDYPLUS solution also incorporates the company's dynamic Ozone Removal Unit (DORS) technology. The machine filters out the unwanted ozone gas created by the etching processes, making it find not only safer but also more efficient. Its auto-gauge and in-situ metrology control tool is also effective in reducing process cycle time as well as ensuring product quality across an array of integrated circuit technology nodes. The asset is controlled by a user-friendly interface, allowing for easy setup and maintenance of the machine. It can also be configured with optional automation equipment, providing easier and simpler operation for customizing production needs. The model provides real-time data for troubleshooting activities for process optimization and it also comes with an intuitive maintenance mode, allowing for quick implementation of preventative maintenance routines. Overall, TOKYO ELECTRON INDY PLUS is an advanced etcher / asher ideal for semiconductor fabs. Its state-of-the-art features are designed to ensure reliable process results with maximum material purity and excellent equipment lifecycle uptime. The system is easy to maintain, cost-effective and comes with a number of automated features to allow smooth execution of integrated circuit production processes.