Used TEL / TOKYO ELECTRON Indy Plus #9179439 for sale

TEL / TOKYO ELECTRON Indy Plus is an etcher, also known as an asher, used in semiconductor research and development. The equipment is fully automated and offers a high degree of process control to ensure repeatable operation and quality. TEL INDYPLUS features advanced control capability and high throughput to support a variety of etching methodologies. The system is designed to allow researchers to directly modify process conditions to optimize etch recipes for a variety of materials and device structures. TOKYO ELECTRON INDY PLUS offers superior temperature control and includes a high capacity hot chuck that maintains a stable working temperature to maximize accuracy. The unit has a digital smart timer with programmable resolution and control of the etching process, giving the user greater flexibility and precision. Featuring six gas inlets, TOKYO ELECTRON INDYPLUS has the ability to optimize multi-gas chemistry and process conditions in a wide range of etching applications. TEL Indy Plus is equipped with a dedicated gas delivery machine to manage the number of gasses used during the etching process. This gas delivery tool can be monitored and adjusted remotely via a web browser interface. TEL / TOKYO ELECTRON INDYPLUS also offers real-time trend tracing of pressure, temperature, flow, and other key etching parameters to maximize process reliability. TEL INDY PLUS etcher has been designed to compatibility with various substrate sizes and loading configurations. With a large capacity load lock and up to six load slots per run, TEL / TOKYO ELECTRON INDY PLUS can be scaled for small and large wafer runs. The asset also features a variety of safety interlocks, alarms, and monitoring technologies to ensure safe and efficient operation in any research environment. It is designed to minimize downtime and optimize productivity for successful and repeatable processing applications. INDY PLUS is a reliable and efficient etching model that offers complete process control to deliver consistent and reproducible results. Fully automated and highly scalable, the equipment is designed to meet the needs of a wide range of research and development laboratories. Utilizing an advanced digital smart timer and sophisticated gas delivery system, Indy Plus is an optimal choice for etching processes.