Used TEL / TOKYO ELECTRON Indy Plus #9211650 for sale

TEL / TOKYO ELECTRON Indy Plus is a flexible, state-of-the-art client process etcher. It effectively etches/asms a variety of laminates, substrates and metals for the fabrication of microelectronics, and other applications. It has multiple process and material capabilities including a wide range of substrate sizes, many process combinations, an easy-to-use user interface, and is equipped with an in-line camera equipment for high-fidelity resolution. TEL INDYPLUS offers the widest process range of any of TEL advanced etching equipment. This range includes plasma etching, etch-back, wet etching, and patterning. The tool also has the flexibility to accommodate a wide range of system laminates and substrates ranging from 0.25 micron through 5 micrometers. The substrate etching capabilities are particularly beneficial to manufacturers of microelectronics, where high-resolution patterns are often used. The easy-to-use user interface provides users with full control over all aspects of the etch process. It allows for parameter adjustment and the running of repeat processes. A MaxVUE tool library provides access to an extensive range of clocking options, pulse widths, and RF powers that are beneficial to simulations that need to be perfected. The in-line camera unit gives users the ability to view each etched part in real time, as well as the optically measure the etch process. This helps ensure that Critical-Dimension (CD) control is maintained during production. This further simplifies the etching process and allows users to monitor the progress across the entire substrate. The advanced diagnostics of TOKYO ELECTRON INDY PLUS tool include a multi-point plasma probe, enabling CD measurement and verification across the entire wafer. The tool also has the ability to detect whether the etch rate is remaining within the preset tolerance range. TOKYO ELECTRON INDYPLUS is well suited for a wide variety of etching needs. It is easy to setup and operate and its wide range of process capabilities makes it an ideal choice for microelectronics fabrication and other process-controlled applications. The in-line camera machine, advanced diagnostics, and comprehensive range of material and process options make it a robust choice for a various etching needs.