Used TEL / TOKYO ELECTRON Indy Plus #9229580 for sale

TEL / TOKYO ELECTRON Indy Plus
ID: 9229580
Wafer Size: 12"
Furnace, 12"
TEL / TOKYO ELECTRON Indy Plus is a state-of-the-art etcher specifically designed for high productivity and reliability. As one of the leading manufacturers of etching equipment, TEL is known for providing high-quality machinery with superior performance. TEL INDYPLUS is manufactured with a focus on delivering fast throughput and reliable operation. TOKYO ELECTRON INDY PLUS is a highly versatile etcher. It can be used to create ultra-thin, high-aspect ratio structures with precise feature size control using either single-step or multi-step etching techniques. It is designed for non-contact processes such as deep reactive-ion-etching (DRIE) and dry etching. This machine also enables high-accuracy patterning of substrates with high aspect ratio features as well as high-volume thin film deposition. Its vacuum compatibility is well-suited for nanolithography processes. TEL Indy Plus is equipped with advanced safety features to ensure a safe work environment for operators. It features a built-in voltage monitoring equipment to protect against electrical shock. There is also a low-maintenance, nozzle-style evacuation valve to maintain a proper vacuum level. Additionally, the protection hood can be operated with the push of a button, allowing operators to keep their hands free while the machine is running. INDYPLUS utilizes advanced process capabilities to deliver superior etching performance. Its chamber is highly efficient, allowing the etching process to be completed with less energy consumption. The chamber is also designed for wide process window capability, giving users the flexibility to operate with a variety of substrates. Furthermore, the advanced control system provides precise real-time control of the etching process. The temperature control unit also allows for precise control of the etching parameters, such as pressure, flow rate, and RF power supply. TEL INDY PLUS provides users with extended etching uniformity, reliability, throughput, and deposition control. It is a popular choice for many etching related tasks such as SOI Application, Ni Nano-Wire Application, Perforation & Cut-off/Passivation, PZT/Ferroelectric Etching, MEMS/NEMS Etching, and Nano Trenching. This machine is ideal for users looking to perform advanced etching processes with superior results.
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