Used TEL / TOKYO ELECTRON Indy Plus #9250264 for sale

TEL / TOKYO ELECTRON Indy Plus is a high-performance etcher / asher for prior to lithography. It is made for efficiently removing oxide layers from silicon or compound semiconductor wafers, while also being able to strip resist layers. TEL INDYPLUS is designed with various features in mind, such as uniformity between the top and bottom surfaces of the wafers, and is capable of controlling ashing performance without causing particle contamination. TOKYO ELECTRON INDY PLUS has a direct reflow top-down dual-frequency plasma source. This design allows a uniform etching effect on the upper and lower surfaces of the wafer, resulting in better throughput and higher accuracy. The product is equipped with an advanced wafer-level process control system, allowing for precise and stable etching and ashing performance. Additionally, there is an embedded monitoring system for the pressure and temperature in the reaction chamber. The reaction chamber has a unique power supply system for various etching/ashing processes. This allows users to select the desired plasma power for different process purposes such as an etching layer or film, surface cleaning, and residue removal. In addition, TEL INDY PLUS has built-in safety features to prevent accidents and fatalities as well as reduce any potential damages to the products. TEL / TOKYO ELECTRON INDYPLUS also comes with a low-pressure, low-power, and timing-controlled delivery of processing gases. This ensures that during the etching/ashing process, no damages are done to the wafers. It can process a wide variety of substrates in a highly efficient manner, with no residues left on the surface. It also has a fast and stable matching of etching and ashing parameters to suit the needs of the user. In conclusion, Indy Plus is a versatile and efficient etcher/asher for silicon and compound semiconductor wafers. With its powerful plasma source, direct reflow top-down design, and built-in safety features, it can provide consistent, uniform results with a high degree of accuracy.