Used TEL / TOKYO ELECTRON Indy Plus #9254679 for sale

TEL / TOKYO ELECTRON Indy Plus etcher is an advanced asher technology designed for various substrate processing techniques including plasma etching, dry etching, ashing and ion milling. The equipment utilizes a combination of high-precision motion and RF power control to provide superior etching results across a wide range of etch applications and materials. It is configured with multiple process chambers for various vacuum techniques and capable of handling large substrates up to 300mm in size. The system features precise control of wafer temperature, RF power, gas pressure, gas flow rates, and etching pressure. This ensures an excellent quality and uniform etch profile. The unit uses a unique dual-blade lift-motor mechanism combined with proprietary pressure and gas flow controls, making it ideal for sensitive, high-resolution etching jobs. Its efficient gas flow configuration ensures uniform etching coverage and isolated areas for high repeatability. The machine offers very low flow rate tolerance and improved process uniformity compared to other etching systems and can etch both thick and thin films, enabling fine definition and tidier etching. A built-in shutter also ensures maximum process control, making it suitable for sensitive applications. In addition, TEL INDYPLUS etcher is extremely flexible, providing a comprehensive set of features for optimizing etching processes across a wide range of etch profiles. It offers a wide range of vacuum process technologies, including both single-chamber and multi-chamber etching, and permits changes in the gas mixture address during the etching process. TOKYO ELECTRON INDY PLUS etcher tool is also highly efficient, allowing for faster throughput and quicker turnaround for substrate processing jobs. Its high-performance make it ideal for short-term production runs or prototyping work. Its modular design allows etchers to swap out process chambers without disturbing the position of any other process components, providing an efficient setup for production processes. Overall, TOKYO ELECTRON Indy Plus is a highly advanced etching asset offering very precise control of etch parameters, to deliver quality etching results on a variety of substrate materials. With its reliable performance, wide range of process technologies, and efficient process control, TEL / TOKYO ELECTRON INDYPLUS etcher is an ideal choice for etching applications.