Used TEL / TOKYO ELECTRON Indy Plus #9261886 for sale

TEL / TOKYO ELECTRON Indy Plus is a state-of-the-art, industrial-grade dry etching equipment, designed to offer superior performance in etch precision, throughput, and cost of ownership. The system is intended for deep vias, trench filling, and lateral etching of semiconductor dies and other devices. It features an advanced chamber design, which allows for advanced plasma technology and superior process repeatability. The unit is capable of supporting a wide range of process windows, including: oxide, poly-Si, nitride, Parylene/Pary, Sputtering, and chemical vapor deposition. The microfabrication chamber is fully automated, with multi-level high-tech touch-screen controls and an integrated recipe programming machine. TEL INDYPLUS is built on the latest technology, including a high-resolution, high-pressure chamber, high-temperature wafer substrate holder, and advanced heat-treating furnace. It also features a closed loop gas delivery tool that helps promote clean and consistent etch processes. The laser beam profiler (LBPP) asset allows for highly precise etching, with precise and uniform depth control across the surface. TOKYO ELECTRON INDY PLUS also utilizes advanced optical reflectometer (ORP) and optimizer (OQP) systems, which provide users with detailed information regarding the quality of the etching process. In addition, TEL INDY PLUS model also features an integrated diagnostic equipment, which helps identify system errors in real time. This diagnostic unit helps operators and engineers identify process problems quickly and accurately. The performance of INDYPLUS etching machine provides the ultimate level of precision and accuracy, allowing for precise and repeatable etching results. It is the perfect tool for both single- and multi-layer etching, and is the ideal etching asset for customers who require industry leading accuracy and consistency.