Used TEL / TOKYO ELECTRON Indy Plus #9296775 for sale

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TEL / TOKYO ELECTRON Indy Plus
Sold
ID: 9296775
Furnace, 12" Process: ALO / ZRO.
TEL / TOKYO ELECTRON Indy Plus is an etcher/asher for the production of high resolution micro-patterns in the production of semiconductor wafers. TEL INDYPLUS is designed to etch patterns down to 20 nm with excellent accuracy and repeatability, allowing for precision micro-pattern transfer. TOKYO ELECTRON INDY PLUS contains highly controllable features enabling control of the etch depth and pattern size. It is capable of controlling depth control parameters such as gas supply, pressure, flow rate, etch rate, rinsing, and plasma etch patterns. The user is able to balance and adjust the etch depth and pattern size via the recipe function temperature, so that their desired micro-patterns are achieved. This etcher/asher also includes a digital display for real-time etch/wash time and temperature monitoring. INDYPLUS etcher/asher also provides an integrated exhaust equipment with an advanced filtration system designed to ensure highest safety and performance in operation. The built-in exhaust filter helps control gas emissions, odor, and dust while preventing hazardous material leakage. Additionally, the user has the capability to control exhaust unit parameters related to gas exhaust and heat transfer. TOKYO ELECTRON Indy Plus comes with a built-in safety machine that prevents over-pressurization and leakage of acidic solutions. The safety tool also provides better control over etching parameters, allowing users to easily adjust the etch depth, pattern size, and contrast. It also includes the capability to detect gas leaks, water leaks, and power outages quickly. TEL / TOKYO ELECTRON INDY PLUS Etcher/Asher is an efficient production tool that comes with a wide range of features and control capabilities. This etcher/asher is designed to suit the needs of industrial and research applications, and it is an ideal choice for those looking for an etcher/washer that delivers precise results with maximum safety.
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