Used TEL / TOKYO ELECTRON Indy Plus #9353223 for sale

TEL / TOKYO ELECTRON Indy Plus
ID: 9353223
CVD Furnace.
TEL / TOKYO ELECTRON Indy Plus is an etcher/asher equipment manufactured by TEL (TOKYO ELECTRON) that is designed for high-end, full-scale production of electronic devices. It is ideal for the physical vapor deposition (PVD) and etching of devices made from a variety of materials, especially semiconductor-based and organic-based materials. TEL INDYPLUS features a dual-source system which allows for the simultaneous coating of both sides of the substrate at the same time. With this feature, the user can remain confident that both sides of the device will meet the desired specifications without having to perform additional steps for separate processing of each side. TOKYO ELECTRON INDY PLUS also features multiple recipes that can be easily pre-programmed and saved for future use. This allows for accurate repeatability of the etch parameters necessary for consistent device production. TOKYO ELECTRON INDYPLUS utilizes the tried and trusted synchronous chamber etching technique which ensures uniform etching across the entire substrate. This ensures that unwanted residue from the etched materials is kept to a minimum and also reduces the amount of time necessary for etching due to the double-sided etching technique. Additionally, Advanced Process Control (APC) features within the unit give the user full control over the etch process, allowing for the deliberate tuning of etching variables such as pressure, pressure gradient, chamber temperature and temperature gradient among many others. This machine offers a variety of options for post-etch processing, including the utilization of wet and dry cleaning processes for fine-tuning the finish. Other functions such as lift pin and high-aspect-ratio trenching are also available for further refinement. INDYPLUS also has built-in safety features such as interlocks and a vacuum warning tool that will alert operators should the vacuum exceed certain pre-set levels. Overall TEL Indy Plus is an ideal asset for the high-end production of electronic devices. It is reliable and highly efficient, and it offers a variety of features that allow for optimized and repeatable production of these devices time and time again.
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