Used TEL / TOKYO ELECTRON Indy Plus #9358355 for sale

TEL / TOKYO ELECTRON Indy Plus is an etcher / asher that is often used for wet etching and dry etching processes. TEL INDYPLUS is a 3-zone equipment with two process chambers and one transfer chamber, with each process chamber having an independent plasma source and evacuable shutter. TOKYO ELECTRON INDY PLUS is well suited for research and industry settings, and can be used to process substrates up to 200 mm in size. TOKYO ELECTRON INDYPLUS' process control system allows for easy setup and switching of etching recipes. The unit is compatible with many different gases, allowing for a variety of etching processes, including wet etching, reactive ion etching (RIE), metal etching, inner layer etching, and wafer backside etching. The etch process can also be customized to create customized process conditions, such as chamber pressure, plasma power, process time, and gas flow. Indy Plus also features programmable shutters, allowing users to correlate substrates to etching conditions. This allows users to optimize the etch process according to the substrate characteristics, such as permittivity, thickness, type of materials, etc. TEL / TOKYO ELECTRON INDY PLUS features temperature control, allowing for temperature maintenance during the etching process. This allows for the precise control of process temperature, helping to ensure consistent etching results, minimizing variation in materials. TEL Indy Plus is well equipped for compatibility and process monitoring. The machine is compatible with TEL TEM controller, which provides in-process monitoring of etching quality, such as etch rate. In addition, INDY PLUS supports wafer transfer protocols, which allow for transfer of substrates outside of the chamber for post-etch analysis. Finally, INDYPLUS is designed for safety, featuring a remote emergency stop button as well as a leak-proof shutter design. TEL INDY PLUS is an advanced etcher/asher that offers reliable etching results, process control, and process monitoring. Its versatility makes it a valuable tool for many research and industry applications, from Wet Etching to Wafer Backside Etching and more. With its advanced safety features, TEL / TOKYO ELECTRON INDYPLUS is a powerhouse of a tool for those looking to etch with precision and reliability.