Used TEL / TOKYO ELECTRON Indy Plus #9375630 for sale

TEL / TOKYO ELECTRON Indy Plus is an innovative etcher/asher for semiconductor device fabrication that is designed to be highly precise and accurate. The equipment utilizes advanced data control, automatic sample transfer, and real-time monitiring of all etching and/or ashing processes. TEL INDYPLUS is capable of single-wafer and batch processing, with a throughput of up to 1000 wafers per hour. TOKYO ELECTRON INDY PLUS provides a highly controlled thermal environment with precise temperature control (50°C to 500°C) and excellent uniformity throughout the surface of the etching/ashing chamber. The system also offers chemical delivery control, featuring precise delivery of reactive gases and etching/ashing chemistries. This guarantees maximum uniformity and repeatability of results. INDYPLUS is equipped with a special energy source that enables highly precise adjustments in the energy profile of ions utilized for etching and/or ashing. This allows for improved control of the etching/ashing process, with better tuning between the etch/ash time, anisotropy, and profile roll-off. This feature allows for greater control over the etching/ashing process, providing greater accuracy and repeatability. TEL / TOKYO ELECTRON INDYPLUS includes an automated spin wafer station to provide precise wafer rotation for uniform etching/ashing on the entire wafer. The unit also employs an automated load lock transfer chamber for efficient sample transfer. This eliminates the need for manual sample loading and unloading operations and ensures that the desired etching/ashing process is achieved on each sample. INDY PLUS is highly user-friendly. It is equipped with a full-color graphical LCD user interface, allowing for easy program creation and modification of etching/ashing parameters. This allows for quick and easy setup and operation for single-wafer and batch processing. Finally, Indy Plus is backed by quality customer support services. The machine is fully supported and backed by a large team of experienced service technicians, who can provide immediate support in the event of any issue. TEL also offers comprehensive training and certification programs, providing the necessary support to optimally utilize their tool for optimal results.