Used TEL / TOKYO ELECTRON Indy Plus #9375631 for sale

TEL / TOKYO ELECTRON Indy Plus
ID: 9375631
Furnace.
TEL / TOKYO ELECTRON Indy Plus is an advanced etcher/asher used for semiconductor applications. It is a multi-chamber equipment designed for processing large Si, compound or alloy wafers at high precision and speed. TEL INDYPLUS's high-speed operation is made possible by the high-end DC/RF power supply, which can provide up to 2,000 watt power needed by the tools. Additionally, TOKYO ELECTRON INDY PLUS has an advanced multi-gas control system and an advanced gas blending and sensing unit, which ensure precise etching and ashing processes. The equipment also comes equipped with a high precision, high speed film thickness monitor for accurate process control. TEL / TOKYO ELECTRON INDY PLUS also offers automated wafer handling and loading, which eliminates manual operation errors and reduces operator fatigue. Additionally, it includes advanced pre-cleaning and process control options, which ensure a controlled and consistent cleaning and pre-process for better resolution and speed. TEL INDY PLUS also features advanced wafer mapping capability. This advanced mapping technology provides detailed process maps to monitor process development and evolution. TOKYO ELECTRON Indy Plus also features an advanced inline metrology machine, which captures and displays precise real-time wafer data. Finally, INDY PLUS also comes with a highly reliable remote service tool monitoring and remote reaction control, which is provided by the company's global support team. This provides users with the ability to remotely diagnose and detect issues with the asset, allowing users to respond quickly and efficiently. Overall, TEL Indy Plus is an advanced multi-chamber etcher/asher model designed for processing large wafers with high precision and speed. It includes high end DC/RF power supply, advanced multi-gas control equipment, high precision film monitors, automated wafer handling, advanced wafer mapping capability and advanced inline metrology systems. Additionally, it provides reliable remote service system monitor and remote reaction control, allowing users to respond quickly and efficiently.
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