Used TEL / TOKYO ELECTRON Indy Plus #9377463 for sale

TEL / TOKYO ELECTRON Indy Plus is an etcher / asher that specializes in EUV photomask blanks. It is used to precisely etch and pack EUV photomask blanks into EUV pellicles ready for lithography. The device features an array of advanced features to maximize etch and packing quality and efficiency. To start, TEL INDYPLUS is equipped with a multi-beam optical alignment equipment. This advanced technology provides for exact placement of the photomask blanks on the pellicle with precise accuracy. In addition, the system is capable of generating individual alignment data for each blank, allowing the etcher to obtain extremely accurate alignment for multiple blankets. TOKYO ELECTRON INDY PLUS also features a high-pressure, low-pressure, and low-voltage plasma etch chamber. This chamber is capable of producing ultra-high etching rates with minimal loading over time. With its advanced process, TOKYO ELECTRON INDYPLUS can achieve highly consistent etching results, even when running a low-gravity or low-temperature process. Finally, TOKYO ELECTRON Indy Plus incorporates a specialized EUV pellicle packing technology. This technology ensures exact packing and positioning of the masks onto the pellicle, resulting in extremely uniform and precise packing of the blanks. TEL / TOKYO ELECTRON INDY PLUS can also be equipped with an automated packing and alignment unit for automated packing of large numbers of masks. In conclusion, TEL / TOKYO ELECTRON INDYPLUS etcher / asher from TEL is a highly advanced device that is capable of generating high-quality EUV photomask blanks that are precisely aligned and packed on EUV pellicles. The device features a multi-beam optical alignment machine, a powerful plasma etch chamber, and a specialized EUV pellicle packing technology. All of these features combine to provide a unique and advanced etching and packing experience.