Used TEL / TOKYO ELECTRON Indy Plus #9384128 for sale

TEL / TOKYO ELECTRON Indy Plus is an advanced etching tool developed for high precision processing needs in the semiconductor industry. It can be used for etching, ashering, and planarizing layers with a high degree of accuracy and repeatability. The tool includes a multi-zone chamber design for superior job uniformity. There are seven distinct zones, each able to withstand different pressures, temperatures, and compositions to provide a uniform outcome over the course of the etching process. It is capable of etching through a variety of materials such as oxide films, metals, polysilicon, resist, and more. TEL INDYPLUS is also equipped with an advanced Gas etch technology that enhances the uniformity and reliability of the etching process. This gas etch process manipulates the flow of gases to enhance the etch profile uniformity which increases throughput, and improves the etch depth of shallow trenches and other features. TOKYO ELECTRON INDY PLUS also offers a wide range of etch recipes, with the cost of ownership being kept low due to its high reliability and durability. The programmable logic control unit ensures precise process control and ensures that the tool is user-friendly. The controller is designed to be easily integrated with existing plant MIS systems, since it is compatible with a variety of communication protocols. An external remote computer interface is available, which allows users to monitor the etch process through a web-based interface. Users can also access a secure web server for process management and analysis. This enables users to get important etch data to analyze and understand processability for improved process optimization. The tool uses an edge ring technology to increase etcher throughput and cut down on process cycle time. This works by using an annealed aluminum oxide to form a cylindrical connection between the electrode, dielectric, and metal. The annealed aluminum oxide edge ring is impervious to etchant gases and resists etching, allowing for more edge control and deeper etches. TEL / TOKYO ELECTRON INDY PLUS also comes with advanced technology to analyze and process large complex structures. This technology allows users to etch more accurately with better uniformity and control over the etching process. The tool is maintenance-friendly, and it offers the latest in cutting-edge technology for precision etching.