Used TEL / TOKYO ELECTRON Indy Plus #9388215 for sale
URL successfully copied!
ID: 9388215
Wafer Size: 12"
Vintage: 2010
Furnace, 12"
Process: ALD High-K
2010 vintage.
TEL / TOKYO ELECTRON Indy Plus is a highly advanced equipment designed for use in semiconductor fabrication. It is an etcher/ascher machine, also known as a chemical-mechanical polishing (CMP) device, designed to enable semiconductor engineers to create and develop microelectronic devices at the forefront of the industry. TEL INDYPLUS has a six-axis, high-speed, precision machine architecture, and is scalable to increase throughput to meet specific challenges. It utilizes a modular design featuring advanced process capabilities and customizable parameters to achieve desired performance. It can also be configured with specific process components, allowing engineers to match the system to their specific needs. TOKYO ELECTRON INDY PLUS offers an advanced AS control unit, allowing for very fine process tuning. This includes an automated control machine (also known as an ATF tool) to provide greater controllability and flexibility in the process. The asset also features a high-performance sensor analysis model that can detect and record various parameters of the etch and polish processes. TOKYO ELECTRON INDYPLUS offers high-volume production with minimal downtime due to its advanced cooling equipment program. With this system, engineers can automate the process and reduce manual intervention, enhancing productivity and increasing yields. TEL INDY PLUS also features advanced metrology capabilities, allowing for accurate and repeatable process monitoring. Advanced metrology methods such as high resolution secondary electron microscopy (SEM) and EDX (model) can be used to monitor etching process results. Overall, Indy Plus is an etcher/ascher unit that provides engineers with highly accurate and reliable processes for semiconductor device fabrication. Its modular design and customizable components allow users to match the machine to their specific needs. The highly advanced process control tool, automated asset control, cooling program, and advanced metrology features provide for accurate and repeatable results, making TEL / TOKYO ELECTRON INDY PLUS one of the most versatile etcher/ascher systems on the market.
There are no reviews yet