Used TEL / TOKYO ELECTRON Indy #293648515 for sale

TEL / TOKYO ELECTRON Indy is a high-performance diffusion etcher/asher designed specifically for semiconductor processing applications. With features such as high etch rate, uniformity, repeatability, and precision control of key process parameters, this equipment can help achieve superior semiconductor device fabrication performance in both digital and analog applications. TEL Indy equipment can be configured to process a variety of materials, including silicon, metals, oxides and nitrides, depending on the application. For silicon, the system is capable of processing thick films with a wide range of etch rates, from µm down to sub-µm, and it can achieve superior etch uniformity of +/- 5% across the entire wafer surface. These benefits translate into improved wafer yields, higher throughputs, and lower production costs. TOKYO ELECTRON Indy unit is available in two models, both of which have a small footprint and modular design that make them easy to integrate into existing semiconductor processing environments. The primary difference between the two models is the plasma source, either RF/DC or RF/microwave, making them suitable for a wide range of substrates and plasma-based processes. Indy machine is equipped with advanced safety features to protect operators and the environment, including a monitor window, surface search sensors, and vent fans with ozone removal function. Software features such as a graphical operating tool and process management asset enable full model automation. In addition, TEL / TOKYO ELECTRON Indy equipment's in-situ monitoring system allows real-time analysis of wafer parameters, improving process monitoring and management. TEL Indy unit is a powerful tool for semiconductor device fabrication and can benefit organizations that need reliable and precision processing for their device designs. With its advanced safety and automation features, the machine can improve yields while reducing production costs and ensuring environmental safety.