Used TEL / TOKYO ELECTRON Indy #293654427 for sale
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ID: 293654427
Wafer Size: 12"
Vintage: 2010
Furnace, 12"
Process: ALD-SiN
2010 vintage.
TEL / TOKYO ELECTRON Indy is a next-generation etcher / asher equipment that provides users with precision, accuracy, and reliability when etching or ashing substrates. This powerful tool is equipped with the latest technology from TEL to ensure the highest level of performance during etching/ashing processes. TEL Indy enables both wet and dry etching processes, as well as ashing and photochemical processes. This increased process flexibility allows users to achieve the exact etching / ashing definition they need for their substrate. TOKYO ELECTRON Indy is designed with a dual load lock design that allows for simultaneous loading and unloading of substrates for faster processing. Additionally, Indy offers a patented "lift-down" wafer transport system for secure removal and loading of the substrates. This feature reduces scratching and provides better process accuracy. TEL / TOKYO ELECTRON Indy's robust 3-stage vacuum turbo pump with oil-free backing and high throughput are invaluable for innovating processes that require fast-processing speeds with minimal substrate damage. TEL Indy boasts a 3-zone chamber design for precise temperature control and uniform processing. High-precision motion controllers provide high level of accuracy and repeatability for nano-scale etching / ashing processes. TOKYO ELECTRON Indy also offers a range of advanced automation features, including remote access for support and maintenance, multiple-array processing capabilities, and software for fully automatic operation of the unit. Finally, Indy is the only etcher/asher machine with a built-in safety feature. The steel frame encloses the whole tool and minimizes potential device hazards. TEL / TOKYO ELECTRON Indy also has sensors that monitor potential gas leaks and halts the asset in the event of hazardous conditions. In conclusion, TEL Indy is the ideal choice for etching and ashing substrates that require high levels of accuracy, precision, and reliability. With its dual load lock design, 3-zone chamber, high-precision motion controllers, and advanced safety features, TOKYO ELECTRON Indy provides the best etching and ashing results in the industry.
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