Used TEL / TOKYO ELECTRON Indy #293658581 for sale

TEL / TOKYO ELECTRON Indy is a state-of-the-art automated asher/etcher equipment designed to enable easy and efficient etching of semiconductor wafer substrates. This fully automated system is capable of using differing etching processes (corrosive, passivation, photoresist, etc.) for a variety of wafer materials and sizes, making it highly versatile. Its advanced features include a computer-controlled front-end with a platform for material handling, an imaging unit for navigating and locating wafers, and a powerful generator for etching them. TEL Indy is specifically designed for maximum throughput, featuring multiple process cycles and a fast wafer transfer time, as well as a reduced contamination rate to ensure that wafers are etched accurately, quickly, and cleanly. The machine has a large process range, with wafer sizes from 50 mm up to 300 mm. It is designed to handle wafers with up to three layers of coating, allowing for the etching of high-performance materials. Breaking down the etching process, TOKYO ELECTRON Indy offers a quick and simple process which begins by loading the wafer in the chuck, then marking the wafer surface for imaging. Next, the imaging tool is used to align the wafer. This allows the etching process to begin, with the powerful generator and multiple process cycles etching the substrate at a rapid rate. After the process is complete, the wafer is unloaded and prepared for the next step. Indy offers a premium level of safety due to its automated process. The asset features an industrial-grade safety model, which includes a cage and a pair of security barriers to ensure the user's safety in the presence of strong acids and other lithography chemicals. The equipment also includes an emergency stop button in case of any accidental misfires. In addition, TEL / TOKYO ELECTRON Indy offers low-maintenance operation with easy maintenance features such as automatic wafer monitoring, automatic nozzle replacement, and automatic process checks. The system also has built-in data storage, allowing manufacturers to store their data and quality checks for further analysis. TEL Indy is an invaluable tool in the semiconductor industry due to its advanced etching capabilities and easy-to-use design. The unit's unique features make it an excellent option for precise and efficient etching of a wide range of semiconductor wafer substrates.