Used TEL / TOKYO ELECTRON Indy #293751273 for sale

TEL / TOKYO ELECTRON Indy is a fully automated etcher/asher designed for cost-effective and high-precision processing. This equipment is used for a range of treatments in the semiconductor industry, including resist ashing, nitride etching, oxide etching, poly etching, metal etching and selective etching. TEL Indy is tailored to deliver optimal performance, precision, and reliability for a range of process requirements. TOKYO ELECTRON Indy holds up to 4 process chambers and can accommodate both metal and dielectric layers. This makes it suitable for a variety of process requirements, including quartz etch, poly resist strip, substrate cleaning, and dielectric etch. This equipment also offers a choice of plasma power sources, including RF, PECVD, and ICP sources. Indy's interface module features easy-to-use panels that allow for a range of operating parameter settings and alarms. An integrated cleanroom environmental control system helps protect the equipment from contaminants. With techniques such as deep reactive ion etching (DRIE), TEL / TOKYO ELECTRON Indy can etch with feature sizes that are finer than those achieved with traditional etching methods. TEL Indy comes with an integrated recipe management unit, which allows for storing multiple recipes for process repeatability. The automated wafer handling machine is also designed for easy operation and provides protection against particle contamination. TOKYO ELECTRON Indy offers a high level of performance and reliability at an affordable cost. It is an ideal choice for precision etching in semiconductor research and manufacuring. It is also ideal for resist ashing, poly etching, and wet etching/plasma etching applications. Indy is a highly efficient, cost-effective, and reliable solution for precision etching needs of the semiconductor industry.