Used TEL / TOKYO ELECTRON Indy #293754737 for sale

TEL / TOKYO ELECTRON Indy (hereafter referred to as TEL Indy) is a high-end, high-throughput etcher/asher that is capable of oxide etching, polysilicon etching, and wafer ashing. TOKYO ELECTRON Indy is constructed using a locally supplied 3-axis table top chamber and an industry-leading control equipment. The chamber is manufactured from grade 316 stainless steel and is coated with a ceramic sheet at the bottom and sides to ensure maximum insulation from thermal effects. Inside the chamber, the substrate is supported by a specialized electro-polished quartz susceptor equipped with a hot plate and three electrodes for efficient application of a plasma etch. Indy boasts a wide array of operational features that help streamline its processes and provide a comprehensive solution. The system has an ultra-fast loadlock for efficient material handling. A sophisticated gas delivery unit allows full control of flow rates, pressure, temperature, and composition. Furthermore, a versatile process recipe management machine can record up to 20 parameters to ensure consistent and repeatable results. The tool's highly efficient plasma source design offers low power consumption, low operating cost, and a long life. This is achieved through the use of an optimized CW magnetron source coupled with advanced sensor technology. This ensures reliable operation while reducing defective substrate rejection. TEL / TOKYO ELECTRON Indy also has an advanced monitoring asset with real-time process control. This ensures that the model can track and optimize the entire process to ensure optimal results. Additionally, real-time temperature control helps maintain target temperatures and enables repeatable etching regardless of the starting temperature. The equipment incorporates an ergonomic design which enables easy operation. It has an optimized user interface with an intuitive display and a simplified control panel. TEL Indy also supports a variety of data analysis and logging functions to meet high levels of statistical process control requirements. Altogether, TOKYO ELECTRON Indy etcher/asher offers premium performance and reliable results in oxide etching, polysilicon etching, and wafer ashing. Its advanced features and innovative design allow it to remain constantly at the cutting edge of processes involving these materials.