Used TEL / TOKYO ELECTRON Indy #293821710 for sale

TEL / TOKYO ELECTRON Indy
ID: 293821710
Vintage: 2007
Furnaces 2007 vintage.
TEL / TOKYO ELECTRON Indy is a type of etcher / asher used for removing unwanted material from a substrate or substrate surface. It is a computer-controlled machine that is divided into three main parts: etching chamber, backside, and process control and communication. The etching chamber is where the etching process takes place. It is a sealed chamber with a gaseous atmosphere and can be customized to meet the specific etching requirements needed by the operator. The process gas flows into the chamber through overhead gas outlets, while the substrate is transferred into the chamber using bulk wafer loaders. The etching process can be controlled through process permits, controlling the temperature, pressure, plasma power, and other parameters. The backside of the etcher / asher is where the process control takes place. It consists of a controller, power supply, thermocouple, vacuum pump, and other system components. The controller communicates with the computer that controls the etching process and makes adjustments to the process parameters according to the operator's instructions. The power supply provides the electricity for the etching process, while the thermocouple and vacuum pump monitor and maintain the temperature and pressure in the etching chamber. The etching process also requires process control and communication. The system connected to the etcher can communicate with the main process control computer and other system components. This is done through communication protocols such as RS-232, Profibus, and TCP/IP. It also allows the operator to view and modify the etching parameters and monitor the etching process over a network. Overall, TEL Indy is an efficient etcher /asher that provides precise control over the etching process. It is capable of etching various types of substrates with a range of different etching gases, allowing for the production of accurate and finely detailed products. Additionally, its process control and communication capabilities enable operators to maximize their product quality and reduce processing times.
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