Used TEL / TOKYO ELECTRON Indy #293824557 for sale

TEL / TOKYO ELECTRON Indy is an advanced etcher/asher for semiconductor device manufacturing. It offers advanced specialization for high aspect ratio etching and ashing processes. For precision etching and ashing, TEL Indy is equipped with three independent etching/ashing sources that can be controlled separately, as well as laser interferometric stage navigation, providing greater repeatability and improved manufacturing results. TOKYO ELECTRON Indy has a maximum process pressure of 10Torr, a maximum capability of 2MHz RF power, and a digital impedance control unit to facilitate precise control of bias potentials. Indy also provides superior flexibility with its wide range of tooling configurations and innovative orientation control capability. This allows for greater control of etching or ashing applications over a wide range of shapes, sizes, and materials. TEL / TOKYO ELECTRON Indy is compatible with a variety of process gases and substrates, further enhancing its ability to meet challenging etching/ashing requirements. Additionally, TEL Indy's multiple process chamber design optimizes the separation between different processes, enabling higher throughput and longer tool uptime. Overall, TOKYO ELECTRON Indy is an advanced, highly specialized etcher/asher that provides optimal performance for a variety of etching and ashing applications.