Used TEL / TOKYO ELECTRON Indy #9121067 for sale

TEL / TOKYO ELECTRON Indy is an advanced etcher / asher that provides optimal processing performance, high throughput, and excellent uniformity with wide process ranges, enabling high quality and reliable production. This device offers an adjustable, fully automated platform and a wide selection of etching, adding and stripping processes - including RIE, CVD and Sputter processes - making it ideal for any process requirement. It is equipped with an advanced and customizable PLC control equipment for controlling the workflows, ensuring stable operation with automated system maintenance and preventative functions. TEL Indy is also designed for greater operation convenience and flexibility, with easy-to-adjust parameters, automatic process condition settings, and easy-to-use remote maintenance capabilities. TOKYO ELECTRON Indy boasts a high-performance etching/asher unit, with a maximum etching rate of 40μm/min, spatial resolution of 5μm, and a process range from 30kHz to 10GHz. Furthermore, its fast response time helps achieve high throughput, with an improved line-by-line replay rate of 7MHz. This machine also has the capability to perform multi-directional etching and ashing, with 4-direction monitoring capability, making it well-suited to the production of fine patterns and small features. In addition, Indy features advanced safety features, including hazard avoidance systems, preventing errors and helping reduce risk. This tool is compliant with environmental safety standards such as SEMI S2, and is compatible with multiple gas delivery systems. TEL / TOKYO ELECTRON Indy was created with advanced machine learning, giving it extraordinary ability in process repeatability and production flexibility, while minimizing downtime and maintenance. Its high-performance capability allows it to provide effective and reliable production solutions for a variety of processes in research and production, and its high precision makes it suitable for applications in semiconductor, MEMS, and IC device manufacturing.