Used TEL / TOKYO ELECTRON Indy #9137330 for sale

TEL / TOKYO ELECTRON Indy is an etcher / asher designed for advanced processes such as high-aspect-ratio anisotropic etching. The etcher / asher features a high-speed RF generator, high power, low ion bombardment, and a high degree of control. It is capable of complex, high precision etching procedures on various materials such as silicon, stainless steel, copper, and glass, as well as a wide range of process parameters, such as wafer size, etch rate, and selectivity. TEL Indy also offers excellent film deposition characteristics. An advanced turbomolecular pumping system ensures maximum process capabilities, and a generous chamber volume combined with the advanced internal components can simultaneously process multiple substrates with large aspect ratios. Its clean design provides a wide range of process parameters, and can be configured to suit different applications. TOKYO ELECTRON Indy is characterized by its uniform plasma and capability to etch small widths and high aspect ratios. It is suitable for etching of thin films such as nano patterning, trench etching, and for both single- and multi-wafer processes. Indy can achieve a significantly higher etching rate than other technologies, and is designed to provide a high degree of process control and flexibility. Its long-lasting components minimize maintenance and downtime to maintain high throughput. TEL / TOKYO ELECTRON Indy also offers a wide range of post-processing features, such as oxygen or nitrogen breakthrough monitoring, ion analytic systems, and CCD camera monitoring, as well as a variety of options for endpoint detection. Additionally, a high-performance diagnostics system is available to enable rapid fault analysis. In conclusion, TEL Indy is an excellent etcher / asher designed for advanced processes such as high-aspect-ratio anisotropic etching. It offers a wide range of process parameters, post-processing features, and fault analysis tools, and its long-lasting components minimize maintenance and downtime to maintain high throughput and productivity.