Used TEL / TOKYO ELECTRON Indy #9141006 for sale

TEL / TOKYO ELECTRON Indy
ID: 9141006
Wafer Size: 12"
Vintage: 2006
Vertical PCVD furnaces, 12" 2006 vintage.
TEL / TOKYO ELECTRON Indy is a high resolution etching equipment that maximizes the production and throughput of your semiconductor production process. The system is designed to work with most types of bulk and device-grade substrates, such as silicon, glass, and stainless steel. TEL Indy unit offers enhanced image resolution and precision in etching, using advanced optics, a helium-neon laser source, and a freeze-drying machine to minimize particle contamination. The tool features a modular design with interchangeable tool-heads to easily switch between etching and etch-clean applications. The integrated software allows users to automatically adjust the power, speed, and voltage settings for each wafer in any specified pattern. The asset also features Hydrofluorodiode (HFC) technology which is designed to provide precise and reliable depth control for etching. The HFC model mixes a combination of inert gases to realize a uniform etching across the entire wafer surface, while also suppressing plasma emission. The tool-heads used in TOKYO ELECTRON Indy etching systems provide unparalleled accuracy and resolution, enabling precise resolution of patterns down to 10nm. The tool-heads can be customised with different cartridge-type components, including via-tools, photoresist spinners, and metal evaporation sources. In addition, Indy equipment utilizes integrated in-process sensors to monitor key process parameters in real-time, such as gas flows, temperatures, and power levels. These sensors are designed to detect any process changes before they become significant enough to affect yield. TEL / TOKYO ELECTRON Indy etching system also supports an array of functions including a low-temperature etch mode for groove-etching, a fast-etch mode for large volume processes, and an anomaly detection function for predicting and preventing possible wafer aberrations. As well as providing superior etching performance, TEL Indy unit also offers high rate processing capability, high throughput, and superior uniformity. With a comprehensive range of features and capabilities, TOKYO ELECTRON Indy is the perfect choice to power your etching production processes.
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