Used TEL / TOKYO ELECTRON Indy #9244851 for sale

TEL / TOKYO ELECTRON Indy
ID: 9244851
Wafer Size: 12"
Vintage: 2007
Diffusion furnaces, 12" 2007 vintage.
TEL / TOKYO ELECTRON Indy is an advanced etching equipment that provides sophisticated control over the etching process. Using advanced technology, TEL Indy is capable of etching a wide variety of substrates with a high degree of accuracy and repeatability. TOKYO ELECTRON Indy utilizes an upgradeable platform to produce etching results that may be tailored to the specific application and layer thickness. The precision etching platform is based on an integrated multistage die-lectric deposition and etch unit, which consists of a high-resolution field emission gun, vacuum chamber, control circuitry, and a proprietary jet control system. This unit allows for precise control of a number of critical etching parameters such as material dose, dose rate, nozzle pressure, etch time, and thickness accuracy. It also offers on-screen personal program specifications and a library of etch recipes which provides for maximum flexibility in adjusting etching parameters. Indy's computer-controlled, automated etch processes minimize human error and make it highly cost-effective and reliable. The machine uses a Windows-based software, offering a user-friendly interface and multiple operational modes, allowing for use of different etch rates, process times, and layer thicknesses. The tool is able to scheme shape etch and conduct block etch, as well as air gap etches and CMP process. It also offers superior P-VDF substrate compatibility, allowing for the use of almost any type of coating. TEL / TOKYO ELECTRON Indy is also equipped with a high accuracy temperature and pressure control asset, providing further accuracy and optimization of etching processes. Using TEL proprietary in-situ temperature tunable magnetron sputtering technology, TEL Indy can be set for optimum etching performance for different materials and layers. Offering a wide range of configurations, such as manual or automated loading, IC processes, batch or single substrate automation, and CMP operations, the Indie provides unmatched versatility and is capable of meeting most etching needs. TOKYO ELECTRON Indy's modular design and engineering allows for easy upgrade and integration with other components and existing infrastructure. In addition, the model's redundancy features provide added reliability for critical industrial environments. With its superior precision and automation, Indy is a perfect choice for demanding etch processes and its process reliability and repeatability make it a dependable, cost-effective choice.
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