Used TEL / TOKYO ELECTRON Indy #9245343 for sale

TEL / TOKYO ELECTRON Indy is an etcher / asher used in the manufacturing of a variety of devices, including integrated circuit chips, displays, sensors, and solar cells. It is a state-of-the-art tool known for providing precise and reliable etching and ashing processing. TEL Indy etcher / asher features a narrow, deep plasma nozzle that distributes regulated plasma energy to generate a deep etch or clean processes in a broad range of materials including low-k substrates. The narrow nozzle and low inductive coupling enable a wide anisotropic etch or clean process with great depth and excellent selectivity. TOKYO ELECTRON Indy etcher / asher has a high-power pulsed-plasma generator that can provide a maximum of 1 kW while its innovative multi-component integrated controller and SECS-GEM software allow for an automated processing of substrates with computer controlled data parameters and programmable recipes. In addition, a wide range of process gases can be processed for a great variety of applications. Indy etcher / asher is configured with two-chamber design that increases productivity and allows for a higher uniformity when processing devices in a production environment. The generator consists of a microwave source, RF generator, distribution, and gas delivery system. The controllers and software are compatible with I/O settings such as MFCs, mass flow controllers, micro-controller, PC network and wafer Mats. Other advantages of TEL / TOKYO ELECTRON Indy etcher / asher include flexible chamber configurations, a choice of two different types of input power - AC or DC - and its compatibility with standard TEL process control interface. The machine is robust and compact for easy installation and efficient space allocation. Known for its reliability, accuracy, repeatability and flexibility, TEL Indy etcher / asher is an ideal all-in-one processing technology that meets the needs of modern industry. Its cost efficiency and simple maintenance makes it a preferred device for etching and ashing applications.