Used TEL / TOKYO ELECTRON Indy #9276770 for sale
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TEL / TOKYO ELECTRON Indy is an etcher/asher designed and manufactured by TEL (TOKYO ELECTRON). It is specifically designed to enable the selective etching and deposition of materials such as metals and polymers films on substrates and to produce a controlled layer of material. TEL Indy has a modular design with three main components: etching chamber, deposition unit and cleaning unit, housed in a vacuum chamber. The etching chamber is made of anodized aluminum and is used for releasing gas and introducing chemicals for etching. The deposition unit is made of stainless steel and is used for depositing a thin film on the wafer. The cleaning unit is made of polished stainless steel and consists of multiple nozzles and chambers that allow for wet and dry cleaning. TOKYO ELECTRON Indy features a wide range of control parameters, including pressure, temperature, gas flow rate, and time, to ensure that the exact etching and deposition takes place. Additionally, Indy utilizes multiple safety features, such as multiple pressure switches, gas rheostats, and interlocks, to ensure optimal performance and safety. TEL / TOKYO ELECTRON Indy has a patented a self-contained vacuum system that ensures the integrity of the chamber and prevents the leakage of materials. The system also has a remote monitoring feature that allows users to remotely monitor and adjust the parameters of the system. TEL Indy uses multiple semiconductor etching and deposition techniques, such as electron-cyclotron resonance (ECR) arc etching, electron beam evaporation (EBE) deposition and physical vapor deposition (PVD) deposition. It also is equipped with a range of accessories, such as reaction chambers, pumps and load locks, to facilitate the various etching and deposition processes. TOKYO ELECTRON Indy is designed with a high degree of versatility, enabling users to etch and deposit a wide range of materials including silicon, aluminum, and semiconductor films. In conclusion, Indy is a highly advanced etcher/asher specifically designed for the selective etching and deposition of materials. It features a wide range of control parameters and multiple safety features to ensure optimal performance and safety. Additionally, its modular design, range of accessories, and versatile semiconductor etching and deposition capabilities make it an ideal tool for a variety of etching and deposition applications.
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