Used TEL / TOKYO ELECTRON Indy #9311033 for sale

TEL / TOKYO ELECTRON Indy (thermal etch/ash) is a high-end dry etch/ash equipment developed by Tokai Electronics. It features a low-pressure chemical etching process and is suitable for the thermal etching of numerous substrates such as Si, SiO2, SiN, SiC, SiGe, WAS, MET, and polymers. The system has excellent process control, with temperature profiles being set and monitored via a process monitor. Its Pyrocordon Etchers have an excellent range of etch parameters, allowing for optimized etching of both thin films and thick films. TEL Indy comes with several etching chambers, enabling etching of a range of materials. The unit also includes a Proximity Etcher, which allows etching of smaller, more intricate patterns and features. The machine also features various options to ensure the highest process repeatability. Process wafer tracking and position control both contribute to the repeatability of the etching process. The tool also includes various options for safety engineering, such as air flow shutters for enhanced safety. Overall, TOKYO ELECTRON Indy thermal etch/ash asset allows for high-precision etching of various substrates. Its robust design, reliable process control, and numerous options for high-precision etching make the model a highly reliable tool for fabricating high-performance electronic devices and components.