Used TEL / TOKYO ELECTRON Indy #9311184 for sale

TEL / TOKYO ELECTRON Indy is a superior etch/ash equipment that provides precise etch/ash process control for very complex memory chip and semiconductor device fabrication. The system is designed with advanced patterning technology, which enables etching or ashing with a variety of different material types and geometries. It offers critical process capabilities such as variable etch/ash process control, equipment stage scanning, substrate stage accuracy control, and automated defect detection. The machine is capable of handling substrates such as Silicon, Germanium, Gallium Arsenide, and Indium Phosphide. All material types can be etched or ashed without the need for any external hardware. The machine is equipped with a touch-screen front panel and a variety of safety and process monitoring features. It has an intuitive graphical user interface, with all necessary features and options arranged in a clear and organized format. The equipment comes with a range of etch/ash process control parameters, including adjustable voltage, power, pressure, and current. It has several sensors and measuring devices that measure various qualities of the etching or ashing process, such as the pressure, current, and temperature. These measurements allow for optimizing the process for different substrate materials and geometries. TEL Indy has an advanced unit control and communication architecture, providing a fast response to commands. The low-noise machine also has anti-vibration technology, which helps maintain high accuracy during etch/ash processes. Moreover, the equipment can be effectively automated, providing considerable time savings compared to manual operation. The tool is designed to handle large volume production, with a capacity of 80 to 160 wafers per hour. In addition, the parallel configuration of the dry etch chamber and asher chamber allows for an increase in throughput, further reducing overall processing time. It's also possible to increase the number of wafers being processed by changing the dry etch and asher configurations. TOKYO ELECTRON Indy is an advanced etch/ash asset, designed for the fabrication of complex substrates. The model offers precise etch/ash process control, allowing for the production of top quality products. The combination of advanced features such as variable process control, automation, and high-throughput makes the equipment the ideal choice for the fabrication of complex substrates.