Used TEL / TOKYO ELECTRON Indy #9379803 for sale

TEL / TOKYO ELECTRON Indy is an etcher/asher designed with advanced and precise technologies to meet the needs of today's semiconductor production. It is equipped with a high quality vapor source capable of delivering an etching rate of up to 10 microns per minute. The etcher/asher features an automatic profile control, allowing for a highly precise, uniform etching process. It is designed to be compatible with all types of etch and ashing gases, including CO2, CH4, SiH4, CF4, CH2F2, and SF6. The etcher/asher is programmed to provide exceptional process repeatability with uniformity and process accuracy necessary for advanced semiconductor device fabrication. It features a unique, auto-feedback equipment that constantly monitors temperature and pressure in order to maintain the optimum etching process parameters. This efficient system helps eliminate the problems associated with temperature and pressure fluctuations. In terms of safety, the etcher/asher is designed with a range of precautionary measures in place to protect technicians from exposure to hazardous materials. These measures include safety validation and shut-off systems, as well as an automatic pressure control unit. Additionally, a dry-side inert gas machine helps remove the etch/ash particle residue from the chamber. TEL Indy is specifically designed to meet the needs and demands of advanced etching and ashing applications. Its advanced features make this etcher/asher ideal for the precise, accurate fabrication of highly advanced semiconductor devices. It is engineered to maintain process repeatability and control parameters while optimizing cycle times. With its superior features, the etcher/asher provides an intuitive and reliable solution for today's high-volume semiconductor production lines.