Used TEL / TOKYO ELECTRON Indy #9381806 for sale
URL successfully copied!
Tap to zoom
ID: 9381806
Wafer Size: 12"
Vintage: 2007
LPCVD Furnace, 12"
Process: DCS-MTO
Rapid cooling unit
Pump box
Power box
VOS-56-101P Heater
FUJIKIN Air valve
MFC, MFM: STEC
MAIN / APC: CKD
Load lock system
Storage
Front panel signal tower
Carrier transfer
FIMS Port
Wafer transfer
Boat elevator
Auto shutter
Operating system: Linux V2.13
Utility box:
WAVES Controller
GFC Panel
Operation panel
Data I/O
Gas unit
Cooling unit
APC Controller
Temperature controller
Vacuum line
Load port:
I/O FFU
Side FFU
Furnace subsystem:
Automation system
Heater
Process chamber
Temperature controller
Cooling water unit
Gas subsystem:
Gas supply unit
Exhaust
Vacuum line
Power box:
EMO Unit
Control board
Hardware switch
Transformer
SCR Unit
N2 Purge unit
RCU Unit
Gases:
SiH4
SiH4Cl2
N2O
NH3
Missing parts:
QUARTZ Wares
Scavenger
Manifold
(2) Hard Disk Drives (HDD)
Power supply: 440/208 V
2007 vintage.
TEL / TOKYO ELECTRON Indy is a reliable asher/etcher equipment designed for precise large scale etching of wide range of materials. The system has an integrated source of advanced process technology and technology platforms to provide excellent etching performance. This allows for etching a wide range of material types such as semiconductors, semiconductor chips, organic substrates, thin films, and many others at a high level of accuracy. The unit comes with a programmable robot controller for precise movement and control, enabling the accurate etching of even intricate patterns. The machine is capable of supporting a variety of process recipes, such as single layer etch, multiple layer etch, AutoClick, and multi-mask etch. These features combine to give the user a complete etching solution with multiple combinations of process capabilities. The tool also has an integrated auto-cleaning feature for quick and efficient cleaning of the etch chamber, ensuring consistent performance. Additionally, the asset is also capable of using argon, nitrogen and oxygen-based gases for etching applications. The model also provides efficient protection against process contamination, with a high purity environment, an efficient gas delivery equipment, and advanced control algorithms. This allows for the maximum extraction of process chemicals, while minimizing the contamination rate. In addition to safe etching performance, the system also comes with a variety of additional features, such as a comprehensive user interface, up to twice the speed of media speed of other equipment, and compatibility with various materials. The unit also has a real-time monitoring capability that allows users to monitor in-situ the etch rate of different materials, as well as an array of alarms to detect any unexpected changes in etching conditions. Overall, TEL Indy etcher/asher is an ideal machine for those who need a reliable, efficient, and comprehensive etching solution. With its user-friendly interface, ability to support a wide range of etching recipes, and advanced features, TOKYO ELECTRON Indy is an ideal choice for a wide variety of etching applications.
There are no reviews yet