Used TEL / TOKYO ELECTRON MB2-730 HT-HT #9145482 for sale

TEL / TOKYO ELECTRON MB2-730 HT-HT
ID: 9145482
Wafer Size: 8"
Vintage: 1996
CVD System, 8" (2) Chambers WSi Process 1996 vintage.
TEL / TOKYO ELECTRON MB2-730 HT-HT is an advanced pre-cleaning etcher / asher that is capable of achieving optimal cleaning results, especially in cases where high temperature is necessary. This machine is equipped with a special high-temperature wafer etching process, enabling it to operate at up to 700 ˚C. The high-temperature wafer etching process ensures wafer removal of residues and contaminants that could not be removed by conventional wet cleaning methods, ensuring the highest possible levels of cleanliness and precision. This equipment features a sealed and shielded quartz processing chamber, designed to protect the operator from any hostile gases, and to help ensure the cleanliness of the etching medium. It also comes with a vector option for etching uniform thin layers some of the most difficult substrates. A unique gas inlet system allows the user to specify the gas concentration and direction, ensuring perfect conditions for high-temperature etching. TEL MB2-730 HT-HT includes a full range of process parameters, which can be programmed into the unit to control the etching process with precise repeatability. Dynamic feedback control is also included, to ensure the process conforms to exact specifications. The process parameters include time, temperature, power, gas concentration, and pressure, allowing for flexible and precisely controlled etching patterns. This unit is designed with a large quartz viewport that allows inspection of the entire interior of the event chamber while the process runs. A multitude of accessories are available, such as beam steering devices, shield-focusing lenses, substrate temperature sensors, and a wide range of gas inlet mixers and pumps. This provides the user with more control over how the process is executed and also helps reduce the overall running costs. TOKYO ELECTRON MB2-730 HT-HT is a versatile and reliable machine that is ideal for achieving optimal results in high-temperature etching applications. It is an indispensable tool in ultra-clean processing environments. The high-precision, high-performance nature of the machine make it ideal for demanding etching applications such as MEMS, display manufacturing, and many other semiconductor processes.
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