Used TEL / TOKYO ELECTRON MB2-730 #9167961 for sale

TEL / TOKYO ELECTRON MB2-730 Etcher / Asher is a multi-chamber, single-wafer dry etching system that provides ultra-high etching precision for various advanced materials. Its two process chambers feature a large process window, allowing for utmost versatility. By combining a medium-power and a high-power inductively-coupled plasma source, excellent utilization of etching steps is further possible. The etcher/asher also features an in situ cleaning function as well as a cutting-edge, tracking-controlled sample stage. This allows for improved uniformity and repeatability of the etching process both for single and multiple layers. The system is equipped with many safety instruments which make it ergonomic and convenient to operate. For instance, the operator can set parameter values through the touch-panel display with an intuitive GUI, and automatic interlock systems protect the system against fire and hazardous conditions. With a 2350 x 2390mm footprint TEL MB2-730 is able to accommodate a range of wafer sizes. It can be used with wafer holders with considerable wafer loading flexibility combined with precision and reproducibility. The chamber's advanced technology enables high selectivity when etching different materials simultaneously. It can achieve up to 40nm accuracy when running etching processes and up to 80nm accuracy when running etching and ashing processes. It also offers ideal conditions for etching of semiconductor devices fabricated on Si, 3D/2.5D integrated systems, and large-scale integrated circuits. TOKYO ELECTRON MB2-730 is designed to support processes such as compound etching, RIE gap fill for ultra-low k dielectric etching, and extensive depositions including metal and dielectric layers. Versatility, precise processes, powerful source utilization, and safety are just a few of the advantages of this reliable etcher/asher. Therefore, MB2-730 Etcher / Asher is the perfect choice for all advanced material etching needs.