Used TEL / TOKYO ELECTRON MB2-730W #9157641 for sale
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ID: 9157641
Wafer Size: 8"
Vintage: 2001
CVD System, 8"
W, WF5, ClF3, Ar, SiH4, H2, N2
2001 vintage.
TEL / TOKYO ELECTRON MB2-730W etcher/asher is a versatile etching and ashing equipment designed for the manufacture of semiconductor devices. The equipment is suitable for use in research and development activities, processing, and fabrication of high-end semiconductor devices. It has a highly compact design and features a number of innovative functions that makes it one of the most advanced etcher/asher on the market. TEL MB2-730W can process a variety of substrate sizes including 5-inch to 12-inch diameters and can process substrates up to 12 mm in thickness. It supports 4-Gas Mass Flow Controllers for best processing results. The two-zone showerhead in the etcher/asher serves to evenly distribute the process gas over the substrate surface. Its advanced electrical network is composed of two electrodes which are set up for either unipolar or bi-directional operation. The etching and ashing is powered by a high-precision power supply which helps in achieving highly accurate etching and ashing profiles. TOKYO ELECTRON MB2-730W etcher-asher also includes a timer and an auto-stop feature to control the end of the process. The operator-friendly display screen located at the front end of the machine ensures easy access to all the necessary parameters. Besides that, the graphical touchscreen interface allows for quick access to the process parameters and real-time process. Overall, MB2-730W etcher/asher offers a reliable platform that provides reliable and precise etching and ashing processes for the fabrication of semiconductor devices. It offers flexibility for process development and production, enabling the process optimization for high-quality fabrication. The user-friendly interface and intuitive software suite adds to the versatility and ease of use of TEL / TOKYO ELECTRON MB2-730W etcher-asher.
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