Used TEL / TOKYO ELECTRON ME-450II #293594207 for sale
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ID: 293594207
Vintage: 1999
Dry etcher
Gas box
Glass size: 370 x 470 mm
(2) Chambers
Monitor rack
Loadlock
Rear block
Indexer
Regulator box
Main rack
Loadlock pump rack
Loadlock pump
P/C-R Pump
P/C-L Pump
Turbo controller rack
(2) Chillers
UPS
1999 vintage.
TEL / TOKYO ELECTRON ME-450II is an etcher/asher, a type of equipment used in semiconductor device manufacturing process. It is capable of producing a wide variety of microelectronic devices, including integrated circuits and memory chips. TEL ME-450II offers superior process control and stability, with a wide range of temperature settings and the ability to accurately control the temperature and pressure of the etching process. The etcher / asher is equipped with a real-time monitoring equipment, which ensures accurate and consistent etching results. The machine is designed to minimize the risk of corrosion, particle contamination, and other potential damage to the microelectronic devices. TOKYO ELECTRON ME-450II has a streamlined, stand-alone structure with a single chamber and can feature a maximum of 5 rotary heads. Its compact size and easy to access controls make it ideal for laboratory settings where space may be limited. This system provides excellent flexibility, allowing for the use of different process gases and the addition of optional components for higher levels of optimization. ME-450II is engineered with a highly efficient, multi-point control unit, very fine temperature and pressure control, and a low total-cost of ownership. This machine is also equipped with an advanced clean-up tool to ensure the best results while lowering costs. In addition to TEL / TOKYO ELECTRON ME-450II's superior process control, it also features user-friendly software, including features such as recipe development, real-time process management, and data logging. This helps users easily monitor, control, and optimize the etching process, resulting in more consistent and reliable results. TEL ME-450II is an advanced etcher / asher capable of delivering superior results for a wide range of applications. It is an effective solution for projects requiring highly precise etching and ashing processes, with a high degree of flexibility in process setup and control. Its intuitive controls and powerful processing capabilities make it the ideal choice for the modern microelectronics manufacturing environment.
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