Used TEL / TOKYO ELECTRON ME-450II #9083622 for sale

TEL / TOKYO ELECTRON ME-450II is a full-featured etcher/asher specifically designed for high-volume pipeline processing in the semiconductor industry. This equipment enables fast etching and ashing processes without shifting wafers. It is built with an advanced multi-dimension evaluation system that allows for the precise adjustment of multiple process parameters, thereby enabling high throughput production. The unit is equipped with a large-capacity wafer loader and unloader, capable of handling wafers up to 200mm diameter. It is also capable of scanning up to 200mm wafers over the full surface area, with a resolution of 5nm. This scanning machine allows for high precision process control, permitting precise tuning of the etching/ashing process. TEL ME-450II is capable of double-sided etching/ashing, ensuring an even surface finish across both sides of the wafer. It also incorporates a number of features designed to minimize defects, including a built-in auto-leveling tool, a shelf-type chamber, and an automated, precision alignment asset. In terms of process parameters, TOKYO ELECTRON ME-450II is able to process simple and complex etching/ashing recipes with repeatable precision. It can manage etch rates as low as 5nm/min, and as high as 400nm/min, depending on the configuration. The model also has the capacity to control multiple gas feed channels with a maximum temperature range of up to 1400°C, giving users complete control over etching or ashing temperatures. ME-450II is also equipped with a powerful vacuum pumping equipment, with a pumping timeout as low as 10 seconds. It also features an advanced monitoring function to alert users of process irregularities. This feature allows for quick recognition of any irregularities, allowing users to promptly take corrective measures to ensure continuous, high-quality production. In addition, TEL / TOKYO ELECTRON ME-450II also has a comprehensive software package designed to maximize user convenience. This package includes a database for storing recipe information, tools for optimizing recipes, and integrated process control capabilities. The software package also features a user-friendly GUI that allows for quick recipe operation and quick analysis of serial data. Overall, TEL ME-450II is a full-featured etcher/asher that offers superior throughput and process control. It is a reliable and versatile tool that is well-suited for heavy production of wafers in the semiconductor industry.