Used TEL / TOKYO ELECTRON RLSA #293589548 for sale

TEL / TOKYO ELECTRON RLSA is a type of computerized etcher, commonly referred to as an asher. The major components of the equipment include a substrate holder, a controller, a reaction chamber and a process chamber, which are all operated by a Windows 7 OS. TEL RLSA etcher has the capability to etch both single and double-sided substrates at the same time. It can etch metals, including aluminum, copper and tungsten, as well as ceramic and quartz substrates. It can be used to etch features such as traces, vias, and pads, as well as holes, slots, and cavities with high precision. The controller consists of a microprocessor and programmable system, allowing for precise settings for each etching process. The process chamber is an enclosed vacuum-tight area that holds the reaction chamber and substrate holder. The reaction chamber consists of a reaction tube which is connected to a vacuum chamber, a gas distribution unit and a set of fixtures. The vacuum chamber is used to provide a low pressure environment and the gas distribution machine is used to add in the gases used in the etching process. The reaction tube is filled with a cleaning solution and the substrate holder holds the workpiece securely. The controller is used to set the etching process parameters such as time, gas flow rate, pressure, temperature and voltage. The controller also shares the etch data with the Windows 7 OS, allowing the user to program the etching process and interact with TOKYO ELECTRON RLSA etcher. It additionally enables automatic nozzle cleaning and wafer verification so that the operator can easily review the etching process results. In summary, RLSA is a versatile etcher that is capable of etching metals, ceramics and quartz substrates with precise accuracy. It is easy to program and interact with via the Windows 7 OS and includes features like nozzle cleaning and wafer verification for enhanced precision.